Edge Polisher | Products - SpeedFam

Edge Polisher

The EPD is a system which improves the Wafer Edge by polishing patterned wafers. The EPD removes foreign and unwanted substances from the edge bevel at critical process nodes. SpeedFam is the pioneer of Edge Polishers for the production of prime wafers. We make use of this system with astonishing results on 300mm, 200mm, and 150mm wafers.

SpeedFam has shipped about 550 Edge Polishers for prime wafers since . The SpeedFam Edge Polisher is the global standard in edge preparation used in prime wafer factories all over the world. SpeedFam supports 300mm, 200mm and 150mm prime wafer production.

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